Study of oxidation and wear behaviors of the Ti-based thin films using Raman spectroscopy

• Main Author: Zaw Moe Aung
• Other Authors: Hsieh, Jang-Hsing
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: http://hdl.handle.net/10356/5509
• Institution: Nanyang Technological University

Wear and thermal oxidation behaviors of d c magnetron sputtered Ti-based thin films, TiN, TiCN (N rich), TiCN (C rich), TiAlN(Ti rich), AlTiN(Al rich),TiSiN and TiCNO were studied using Raman spectroscopy. The oxide surfaces after the static oxidation test and wear debris generated from pin-on-disc...