Simulations of embossing process for micro features fabrication
With the development of the micro- and nano-fabrication industry, roller to roller embossing has been proven to yield large areas of continuous, robust patterns for devices such as DNA chips, optical switches, micro reactors, ink jet printing heads and accelerometers, which implies that this process...
Saved in:
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Theses and Dissertations |
| Language: | English |
| Published: |
2013
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/10356/55144 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Nanyang Technological University |
| Language: | English |