Simulations of embossing process for micro features fabrication

• Main Author: Fang, Jian Cong
• Other Authors: Zhong Zhaowei
• Format: Theses and Dissertations
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Mechanical engineering
• Online Access: http://hdl.handle.net/10356/55144
• Institution: Nanyang Technological University

With the development of the micro- and nano-fabrication industry, roller to roller embossing has been proven to yield large areas of continuous, robust patterns for devices such as DNA chips, optical switches, micro reactors, ink jet printing heads and accelerometers, which implies that this process...