Design and development of capacitive ultrasonic transducer using silicon micromachining techniques

Ultrasound has many applications such as ranging, nondestructive evaluation, gas flow measurement, and acoustic microscopy. Conventional piezoelectric transducers perform poorly for these applications due to the lack of proper matching layer materials between the transducer and air. Capacitive ultra...

Full description

Saved in:

Bibliographic Details
Main Author:	Chen, Zhong Yi.
Other Authors:	Lin, Rongming
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Manufacturing
Online Access:	http://hdl.handle.net/10356/5533
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-5533
record_format	dspace
spelling	sg-ntu-dr.10356-55332023-03-11T17:46:10Z Design and development of capacitive ultrasonic transducer using silicon micromachining techniques Chen, Zhong Yi. Lin, Rongming School of Mechanical and Production Engineering DRNTU::Engineering::Manufacturing Ultrasound has many applications such as ranging, nondestructive evaluation, gas flow measurement, and acoustic microscopy. Conventional piezoelectric transducers perform poorly for these applications due to the lack of proper matching layer materials between the transducer and air. Capacitive ultrasonic transducers promise higher efficiency and broader bandwidth performance for these applications. The capacitive ultrasonic transducer developed in this project is based on standard silicon micromachining technology. It consists of a metalized membrane (top electrode) suspended above a heavily doped silicon backplate (bottom electrode). Master of Science 2008-09-17T10:52:51Z 2008-09-17T10:52:51Z 1999 1999 Thesis http://hdl.handle.net/10356/5533 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Manufacturing
spellingShingle	DRNTU::Engineering::Manufacturing Chen, Zhong Yi. Design and development of capacitive ultrasonic transducer using silicon micromachining techniques
description	Ultrasound has many applications such as ranging, nondestructive evaluation, gas flow measurement, and acoustic microscopy. Conventional piezoelectric transducers perform poorly for these applications due to the lack of proper matching layer materials between the transducer and air. Capacitive ultrasonic transducers promise higher efficiency and broader bandwidth performance for these applications. The capacitive ultrasonic transducer developed in this project is based on standard silicon micromachining technology. It consists of a metalized membrane (top electrode) suspended above a heavily doped silicon backplate (bottom electrode).
author2	Lin, Rongming
author_facet	Lin, Rongming Chen, Zhong Yi.
format	Theses and Dissertations
author	Chen, Zhong Yi.
author_sort	Chen, Zhong Yi.
title	Design and development of capacitive ultrasonic transducer using silicon micromachining techniques
title_short	Design and development of capacitive ultrasonic transducer using silicon micromachining techniques
title_full	Design and development of capacitive ultrasonic transducer using silicon micromachining techniques
title_fullStr	Design and development of capacitive ultrasonic transducer using silicon micromachining techniques
title_full_unstemmed	Design and development of capacitive ultrasonic transducer using silicon micromachining techniques
title_sort	design and development of capacitive ultrasonic transducer using silicon micromachining techniques
publishDate	2008
url	http://hdl.handle.net/10356/5533
_version_	1761781363901464576

Design and development of capacitive ultrasonic transducer using silicon micromachining techniques

Similar Items