Design and development of capacitive ultrasonic transducer using silicon micromachining techniques

• Main Author: Chen, Zhong Yi.
• Other Authors: Lin, Rongming
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Manufacturing
• Online Access: http://hdl.handle.net/10356/5533
• Institution: Nanyang Technological University

Ultrasound has many applications such as ranging, nondestructive evaluation, gas flow measurement, and acoustic microscopy. Conventional piezoelectric transducers perform poorly for these applications due to the lack of proper matching layer materials between the transducer and air. Capacitive ultra...