Development and characterization of PZT thin films

Development and characterization of PZT thin films

Fabrication processes and testing of the completed devices were carried out at NTU Micro-Machine Center. X-ray diffraction analysis and the Polarisation-Field (P-E hysteresis loops) of PZT thin film were measured to characterize the film quality and the electrical properties. The process to fabricat...

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Main Author: Zhou, Min.
Other Authors: Miao, Jianmin
Format: Theses and Dissertations
Published: 2008
Subjects:
DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Online Access:http://hdl.handle.net/10356/5574
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Institution: Nanyang Technological University
id sg-ntu-dr.10356-5574
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spelling sg-ntu-dr.10356-55742023-03-11T17:15:10Z Development and characterization of PZT thin films Zhou, Min. Miao, Jianmin School of Mechanical and Production Engineering DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films Fabrication processes and testing of the completed devices were carried out at NTU Micro-Machine Center. X-ray diffraction analysis and the Polarisation-Field (P-E hysteresis loops) of PZT thin film were measured to characterize the film quality and the electrical properties. The process to fabricate the cantilever structure should be optimized to obtain the maximum piezoelectric constants and low residual stress. Master of Science (Precision Engineering) 2008-09-17T10:54:05Z 2008-09-17T10:54:05Z 2002 2002 Thesis http://hdl.handle.net/10356/5574 Nanyang Technological University application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
topic DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
spellingShingle DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Zhou, Min.
Development and characterization of PZT thin films
description Fabrication processes and testing of the completed devices were carried out at NTU Micro-Machine Center. X-ray diffraction analysis and the Polarisation-Field (P-E hysteresis loops) of PZT thin film were measured to characterize the film quality and the electrical properties. The process to fabricate the cantilever structure should be optimized to obtain the maximum piezoelectric constants and low residual stress.
author2 Miao, Jianmin
author_facet Miao, Jianmin
Zhou, Min.
format Theses and Dissertations
author Zhou, Min.
author_sort Zhou, Min.
title Development and characterization of PZT thin films
title_short Development and characterization of PZT thin films
title_full Development and characterization of PZT thin films
title_fullStr Development and characterization of PZT thin films
title_full_unstemmed Development and characterization of PZT thin films
title_sort development and characterization of pzt thin films
publishDate 2008
url http://hdl.handle.net/10356/5574
_version_ 1761781169836261376

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