Total fab monitoring tool (TFM) for a semiconductor company

The report presents the overview of how the Total Fab Monitoring Tool (TFM) is implemented in the author's company - Infineon Technologies.

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Bibliographic Details
Main Author: Chua, Yong Chin.
Other Authors: Jiao, Roger Jianxin
Format: Theses and Dissertations
Published: 2008
Subjects:
Online Access:http://hdl.handle.net/10356/5658
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Institution: Nanyang Technological University
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