Characterization of mechanical properties of microfabricated film
This paper reports on the development of a tester capable of measuring the submicron level deformation of microfabricated films deformed by a compressive force of micro-Newton range.
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/5868 |
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| Institution: | Nanyang Technological University |
| Summary: | This paper reports on the development of a tester capable of measuring the submicron level deformation of microfabricated films deformed by a compressive force of micro-Newton range. |
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