Characterization of mechanical properties of microfabricated film

This paper reports on the development of a tester capable of measuring the submicron level deformation of microfabricated films deformed by a compressive force of micro-Newton range.

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Bibliographic Details
Main Author:	Khoo, Hwa Seng.
Other Authors:	Liu, Kuo-Kang
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Materials::Mechanical strength of materials
Online Access:	http://hdl.handle.net/10356/5868
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-5868
record_format	dspace
spelling	sg-ntu-dr.10356-58682023-03-11T17:03:13Z Characterization of mechanical properties of microfabricated film Khoo, Hwa Seng. Liu, Kuo-Kang School of Mechanical and Production Engineering DRNTU::Engineering::Materials::Mechanical strength of materials This paper reports on the development of a tester capable of measuring the submicron level deformation of microfabricated films deformed by a compressive force of micro-Newton range. Master of Engineering (MPE) 2008-09-17T11:01:07Z 2008-09-17T11:01:07Z 2003 2003 Thesis http://hdl.handle.net/10356/5868 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Materials::Mechanical strength of materials
spellingShingle	DRNTU::Engineering::Materials::Mechanical strength of materials Khoo, Hwa Seng. Characterization of mechanical properties of microfabricated film
description	This paper reports on the development of a tester capable of measuring the submicron level deformation of microfabricated films deformed by a compressive force of micro-Newton range.
author2	Liu, Kuo-Kang
author_facet	Liu, Kuo-Kang Khoo, Hwa Seng.
format	Theses and Dissertations
author	Khoo, Hwa Seng.
author_sort	Khoo, Hwa Seng.
title	Characterization of mechanical properties of microfabricated film
title_short	Characterization of mechanical properties of microfabricated film
title_full	Characterization of mechanical properties of microfabricated film
title_fullStr	Characterization of mechanical properties of microfabricated film
title_full_unstemmed	Characterization of mechanical properties of microfabricated film
title_sort	characterization of mechanical properties of microfabricated film
publishDate	2008
url	http://hdl.handle.net/10356/5868
_version_	1761781877178368000

Characterization of mechanical properties of microfabricated film

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