Design and simulation of microgyroscope

• Main Author: Leong, Chee Yong.
• Other Authors: Miao, Jianmin
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Mechanical engineering::Bio-mechatronics
• Online Access: http://hdl.handle.net/10356/5957
• Institution: Nanyang Technological University

Micromachined inertial sensors, consisting of accelerometers and gyroscopes are considered as one of the most highly sought after silicon based micro sensors. Micro- Electro-Mechanical System (MEMS) gyroscopes have attracted a lot of attention for its potential wide range of applications. They can b...