Design and simulation of microgyroscope
Micromachined inertial sensors, consisting of accelerometers and gyroscopes are considered as one of the most highly sought after silicon based micro sensors. Micro- Electro-Mechanical System (MEMS) gyroscopes have attracted a lot of attention for its potential wide range of applications. They can b...
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/5957 |
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| Institution: | Nanyang Technological University |