A study of the effects of heater surface conditions on heat transfer efficiency in CVD TiN process

The objective of this project is to shorten the time needed for achieving the process specification by using appropriate chamber conditioning methods and to improve the process performance of the heater by eliminating the “hot spots ” on the heater surface.

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Bibliographic Details
Main Author:	Lye, Tong Meng.
Other Authors:	Zhong, Zhaowei
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Mechanical engineering
Online Access:	http://hdl.handle.net/10356/6126
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-6126
record_format	dspace
spelling	sg-ntu-dr.10356-61262023-03-11T17:09:41Z A study of the effects of heater surface conditions on heat transfer efficiency in CVD TiN process Lye, Tong Meng. Zhong, Zhaowei School of Mechanical and Production Engineering DRNTU::Engineering::Mechanical engineering The objective of this project is to shorten the time needed for achieving the process specification by using appropriate chamber conditioning methods and to improve the process performance of the heater by eliminating the “hot spots ” on the heater surface. Master of Science (Precision Engineering) 2008-09-17T11:07:23Z 2008-09-17T11:07:23Z 2002 2002 Thesis http://hdl.handle.net/10356/6126 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Mechanical engineering
spellingShingle	DRNTU::Engineering::Mechanical engineering Lye, Tong Meng. A study of the effects of heater surface conditions on heat transfer efficiency in CVD TiN process
description	The objective of this project is to shorten the time needed for achieving the process specification by using appropriate chamber conditioning methods and to improve the process performance of the heater by eliminating the “hot spots ” on the heater surface.
author2	Zhong, Zhaowei
author_facet	Zhong, Zhaowei Lye, Tong Meng.
format	Theses and Dissertations
author	Lye, Tong Meng.
author_sort	Lye, Tong Meng.
title	A study of the effects of heater surface conditions on heat transfer efficiency in CVD TiN process
title_short	A study of the effects of heater surface conditions on heat transfer efficiency in CVD TiN process
title_full	A study of the effects of heater surface conditions on heat transfer efficiency in CVD TiN process
title_fullStr	A study of the effects of heater surface conditions on heat transfer efficiency in CVD TiN process
title_full_unstemmed	A study of the effects of heater surface conditions on heat transfer efficiency in CVD TiN process
title_sort	study of the effects of heater surface conditions on heat transfer efficiency in cvd tin process
publishDate	2008
url	http://hdl.handle.net/10356/6126
_version_	1761781666633744384

A study of the effects of heater surface conditions on heat transfer efficiency in CVD TiN process

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