A study of the effects of heater surface conditions on heat transfer efficiency in CVD TiN process
The objective of this project is to shorten the time needed for achieving the process specification by using appropriate chamber conditioning methods and to improve the process performance of the heater by eliminating the “hot spots ” on the heater surface.
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/6126 |
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| Institution: | Nanyang Technological University |