Ion beam micromachining of crystalline solids
In this thesis, mathematical models are developed from the FIB sputtering parameters and the substrate material properties for the calculation of surface roughness.
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/6167 |
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| Institution: | Nanyang Technological University |
| Summary: | In this thesis, mathematical models are developed from the FIB sputtering parameters and the substrate material properties for the calculation of surface roughness. |
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