Ion beam micromachining of crystalline solids

In this thesis, mathematical models are developed from the FIB sputtering parameters and the substrate material properties for the calculation of surface roughness.

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Bibliographic Details
Main Author:	Mohammad Yeakub Ali.
Other Authors:	Hung, Nguyen Phu
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Manufacturing
Online Access:	http://hdl.handle.net/10356/6167
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-6167
record_format	dspace
spelling	sg-ntu-dr.10356-61672023-03-11T17:21:57Z Ion beam micromachining of crystalline solids Mohammad Yeakub Ali. Hung, Nguyen Phu School of Mechanical and Production Engineering DRNTU::Engineering::Manufacturing In this thesis, mathematical models are developed from the FIB sputtering parameters and the substrate material properties for the calculation of surface roughness. Doctor of Philosophy (MPE) 2008-09-17T11:08:19Z 2008-09-17T11:08:19Z 2002 2002 Thesis http://hdl.handle.net/10356/6167 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Manufacturing
spellingShingle	DRNTU::Engineering::Manufacturing Mohammad Yeakub Ali. Ion beam micromachining of crystalline solids
description	In this thesis, mathematical models are developed from the FIB sputtering parameters and the substrate material properties for the calculation of surface roughness.
author2	Hung, Nguyen Phu
author_facet	Hung, Nguyen Phu Mohammad Yeakub Ali.
format	Theses and Dissertations
author	Mohammad Yeakub Ali.
author_sort	Mohammad Yeakub Ali.
title	Ion beam micromachining of crystalline solids
title_short	Ion beam micromachining of crystalline solids
title_full	Ion beam micromachining of crystalline solids
title_fullStr	Ion beam micromachining of crystalline solids
title_full_unstemmed	Ion beam micromachining of crystalline solids
title_sort	ion beam micromachining of crystalline solids
publishDate	2008
url	http://hdl.handle.net/10356/6167
_version_	1761781878018277376

Ion beam micromachining of crystalline solids

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