Ion beam micromachining of crystalline solids
In this thesis, mathematical models are developed from the FIB sputtering parameters and the substrate material properties for the calculation of surface roughness.
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| 格式: | Theses and Dissertations |
| 出版: |
2008
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| 在線閱讀: | http://hdl.handle.net/10356/6167 |
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| 機構: | Nanyang Technological University |