Piezoresponse force microscopy characterization of PbZr0.52Ti0.48O3 thin films deposited by sol-gel and pulsed laser deposition

• Main Author: Tan, Jun Ming
• Other Authors: Chen Lang
• Format: Final Year Project
• Language: English
• Published: 2015
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: http://hdl.handle.net/10356/62008
• Institution: Nanyang Technological University

In this report, PbZr0.52Ti0.48O3 thin films deposited via sol-gel method and pulsed laser deposition (PLD) were investigated using Piezoresponse Force Microscopy (PFM) for microscopic piezoelectric characteristic measurements. Electrical properties including dielectric, ferroelectric, and piezoelect...