Defect pattern detection using a new rule-based approach

• Main Author: Shankar, N. G
• Other Authors: Zhong Zhaowei
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Mechanical engineering::Mechatronics
• Online Access: https://hdl.handle.net/10356/6209
• Institution: Nanyang Technological University

Automated inspection of semiconductor defect data has become increasingly important over the past several years as a means of quickly understanding and controlling contamination sources and process faults, which impact product yield. To address the issue of too much data and too little time, automat...