Design of CIM environment for automated wafer manufacturing process cell system

This thesis focuses on the issues concerned with the design of Computer Integrated Manufacturing (CIM) environment based on Semiconductor Equipment and Materials International (SEMI) guidelines and SEMATECH standards framework used in shop floor information control system for wafer manufacturing pro...

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Bibliographic Details
Main Author:	Channaiah B. Ramakumar.
Other Authors:	Goh, Kiah Mok
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Manufacturing::Production management
Online Access:	http://hdl.handle.net/10356/6317
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-6317
record_format	dspace
spelling	sg-ntu-dr.10356-63172023-03-11T17:16:37Z Design of CIM environment for automated wafer manufacturing process cell system Channaiah B. Ramakumar. Goh, Kiah Mok School of Mechanical and Production Engineering DRNTU::Engineering::Manufacturing::Production management This thesis focuses on the issues concerned with the design of Computer Integrated Manufacturing (CIM) environment based on Semiconductor Equipment and Materials International (SEMI) guidelines and SEMATECH standards framework used in shop floor information control system for wafer manufacturing process system. Master of Science (Computer Integrated Manufacturing) 2008-09-17T11:11:51Z 2008-09-17T11:11:51Z 2002 2002 Thesis http://hdl.handle.net/10356/6317 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Manufacturing::Production management
spellingShingle	DRNTU::Engineering::Manufacturing::Production management Channaiah B. Ramakumar. Design of CIM environment for automated wafer manufacturing process cell system
description	This thesis focuses on the issues concerned with the design of Computer Integrated Manufacturing (CIM) environment based on Semiconductor Equipment and Materials International (SEMI) guidelines and SEMATECH standards framework used in shop floor information control system for wafer manufacturing process system.
author2	Goh, Kiah Mok
author_facet	Goh, Kiah Mok Channaiah B. Ramakumar.
format	Theses and Dissertations
author	Channaiah B. Ramakumar.
author_sort	Channaiah B. Ramakumar.
title	Design of CIM environment for automated wafer manufacturing process cell system
title_short	Design of CIM environment for automated wafer manufacturing process cell system
title_full	Design of CIM environment for automated wafer manufacturing process cell system
title_fullStr	Design of CIM environment for automated wafer manufacturing process cell system
title_full_unstemmed	Design of CIM environment for automated wafer manufacturing process cell system
title_sort	design of cim environment for automated wafer manufacturing process cell system
publishDate	2008
url	http://hdl.handle.net/10356/6317
_version_	1761781746309791744

Design of CIM environment for automated wafer manufacturing process cell system

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