Design of CIM environment for automated wafer manufacturing process cell system

• Main Author: Channaiah B. Ramakumar.
• Other Authors: Goh, Kiah Mok
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Manufacturing::Production management
• Online Access: http://hdl.handle.net/10356/6317
• Institution: Nanyang Technological University

This thesis focuses on the issues concerned with the design of Computer Integrated Manufacturing (CIM) environment based on Semiconductor Equipment and Materials International (SEMI) guidelines and SEMATECH standards framework used in shop floor information control system for wafer manufacturing pro...