CIM automation in a semiconductor industry - The virtual factory system

CIM automation in a semiconductor industry - The virtual factory system

This thesis describes the implementation of computer integrated manufacturing (CIM) automation in a Semiconductor Assembly and Test facility. The focus is on the enterprise vision of a Virtual Factory System (VFS) namely factory wide equipment SEMI Equipment Communication Standard/Generic Equipment...

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Bibliographic Details
Main Author: Sim, See Hwa.
Other Authors: Sivakumar, Appa Iyer
Format: Theses and Dissertations
Published: 2008
Subjects:
DRNTU::Engineering::Manufacturing::Production management
Online Access:http://hdl.handle.net/10356/6380
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Institution: Nanyang Technological University
id sg-ntu-dr.10356-6380
record_format dspace
spelling sg-ntu-dr.10356-63802023-03-11T16:57:18Z CIM automation in a semiconductor industry - The virtual factory system Sim, See Hwa. Sivakumar, Appa Iyer School of Mechanical and Production Engineering DRNTU::Engineering::Manufacturing::Production management This thesis describes the implementation of computer integrated manufacturing (CIM) automation in a Semiconductor Assembly and Test facility. The focus is on the enterprise vision of a Virtual Factory System (VFS) namely factory wide equipment SEMI Equipment Communication Standard/Generic Equipment Model (SECS/GEM) system connectivity and factory wide Automated Material Handling System (AMHS) implementation. (Professor Sivakumar) Master of Science (Computer Integrated Manufacturing) 2008-09-17T11:13:22Z 2008-09-17T11:13:22Z 2002 2002 Thesis http://hdl.handle.net/10356/6380 Nanyang Technological University application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
topic DRNTU::Engineering::Manufacturing::Production management
spellingShingle DRNTU::Engineering::Manufacturing::Production management
Sim, See Hwa.
CIM automation in a semiconductor industry - The virtual factory system
description This thesis describes the implementation of computer integrated manufacturing (CIM) automation in a Semiconductor Assembly and Test facility. The focus is on the enterprise vision of a Virtual Factory System (VFS) namely factory wide equipment SEMI Equipment Communication Standard/Generic Equipment Model (SECS/GEM) system connectivity and factory wide Automated Material Handling System (AMHS) implementation. (Professor Sivakumar)
author2 Sivakumar, Appa Iyer
author_facet Sivakumar, Appa Iyer
Sim, See Hwa.
format Theses and Dissertations
author Sim, See Hwa.
author_sort Sim, See Hwa.
title CIM automation in a semiconductor industry - The virtual factory system
title_short CIM automation in a semiconductor industry - The virtual factory system
title_full CIM automation in a semiconductor industry - The virtual factory system
title_fullStr CIM automation in a semiconductor industry - The virtual factory system
title_full_unstemmed CIM automation in a semiconductor industry - The virtual factory system
title_sort cim automation in a semiconductor industry - the virtual factory system
publishDate 2008
url http://hdl.handle.net/10356/6380
_version_ 1761781482032988160

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