CIM automation in a semiconductor industry - The virtual factory system
This thesis describes the implementation of computer integrated manufacturing (CIM) automation in a Semiconductor Assembly and Test facility. The focus is on the enterprise vision of a Virtual Factory System (VFS) namely factory wide equipment SEMI Equipment Communication Standard/Generic Equipment...
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sg-ntu-dr.10356-63802023-03-11T16:57:18Z CIM automation in a semiconductor industry - The virtual factory system Sim, See Hwa. Sivakumar, Appa Iyer School of Mechanical and Production Engineering DRNTU::Engineering::Manufacturing::Production management This thesis describes the implementation of computer integrated manufacturing (CIM) automation in a Semiconductor Assembly and Test facility. The focus is on the enterprise vision of a Virtual Factory System (VFS) namely factory wide equipment SEMI Equipment Communication Standard/Generic Equipment Model (SECS/GEM) system connectivity and factory wide Automated Material Handling System (AMHS) implementation. (Professor Sivakumar) Master of Science (Computer Integrated Manufacturing) 2008-09-17T11:13:22Z 2008-09-17T11:13:22Z 2002 2002 Thesis http://hdl.handle.net/10356/6380 Nanyang Technological University application/pdf |
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DRNTU::Engineering::Manufacturing::Production management Sim, See Hwa. CIM automation in a semiconductor industry - The virtual factory system |
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This thesis describes the implementation of computer integrated manufacturing (CIM) automation in a Semiconductor Assembly and Test facility. The focus is on the enterprise vision of a Virtual Factory System (VFS) namely factory wide equipment SEMI Equipment Communication Standard/Generic Equipment Model (SECS/GEM) system connectivity and factory wide Automated Material Handling System (AMHS) implementation. (Professor Sivakumar) |
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Sivakumar, Appa Iyer |
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Sivakumar, Appa Iyer Sim, See Hwa. |
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Theses and Dissertations |
author |
Sim, See Hwa. |
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Sim, See Hwa. |
title |
CIM automation in a semiconductor industry - The virtual factory system |
title_short |
CIM automation in a semiconductor industry - The virtual factory system |
title_full |
CIM automation in a semiconductor industry - The virtual factory system |
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CIM automation in a semiconductor industry - The virtual factory system |
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CIM automation in a semiconductor industry - The virtual factory system |
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cim automation in a semiconductor industry - the virtual factory system |
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2008 |
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http://hdl.handle.net/10356/6380 |
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1761781482032988160 |