CIM automation in a semiconductor industry - The virtual factory system
This thesis describes the implementation of computer integrated manufacturing (CIM) automation in a Semiconductor Assembly and Test facility. The focus is on the enterprise vision of a Virtual Factory System (VFS) namely factory wide equipment SEMI Equipment Communication Standard/Generic Equipment...
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/6380 |
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| Institution: | Nanyang Technological University |
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