Optical characterization of metal oxide thin films

• 主要作者: Ng, Marcus Jian Wei
• 其他作者: Chen Tupei
• 格式: Final Year Project
• 語言: English
• 出版: 2015
• 主題: DRNTU::Engineering::Electrical and electronic engineering::Semiconductors; DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
• 在線閱讀: http://hdl.handle.net/10356/63844
• 機構: Nanyang Technological University

Optical properties including complex dielectric function and band gap of ZnO, indium gallium zinc oxide (IGZO) and Al-doped ZnO (AZO) thin films were studied with spectroscopic ellipsometry based on various optical dispersion models. ZnO thin film exhibits a slightly blue shift in both real and imag...