Optical characterization of metal oxide thin films

• Main Author: Ng, Marcus Jian Wei
• Other Authors: Chen Tupei
• Format: Final Year Project
• Language: English
• Published: 2015
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Semiconductors; DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
• Online Access: http://hdl.handle.net/10356/63844
• Institution: Nanyang Technological University

Optical properties including complex dielectric function and band gap of ZnO, indium gallium zinc oxide (IGZO) and Al-doped ZnO (AZO) thin films were studied with spectroscopic ellipsometry based on various optical dispersion models. ZnO thin film exhibits a slightly blue shift in both real and imag...