Deposition and characterisation of carbon thin films via patented Off-Plane Double Bend FCVA deposition system

• Main Author: Lee, Jin Zhou
• Other Authors: Tay Beng Kang
• Format: Final Year Project
• Language: English
• Published: Nanyang Technological University 2022
• Subjects: Engineering::Electrical and electronic engineering::Microelectronics; Engineering::Electrical and electronic engineering::Semiconductors
• Online Access: https://hdl.handle.net/10356/157402
• Institution: Nanyang Technological University

In this project, carbon thin films that are deposited by Off-Plane Double Bend (OPDB) Filtered Cathodic Vacuum Arc (FCVA) system are characterised. By varying the substrate temperature and voltage bias of the FCVA system, different types of carbon thin film can be obtained. Tetrahedral amorphous car...