Deposition and characterisation of carbon thin films via patented Off-Plane Double Bend FCVA deposition system

• 主要作者: Lee, Jin Zhou
• 其他作者: Tay Beng Kang
• 格式: Final Year Project
• 語言: English
• 出版: Nanyang Technological University 2022
• 主題: Engineering::Electrical and electronic engineering::Microelectronics; Engineering::Electrical and electronic engineering::Semiconductors
• 在線閱讀: https://hdl.handle.net/10356/157402

In this project, carbon thin films that are deposited by Off-Plane Double Bend (OPDB) Filtered Cathodic Vacuum Arc (FCVA) system are characterised. By varying the substrate temperature and voltage bias of the FCVA system, different types of carbon thin film can be obtained. Tetrahedral amorphous car...