Deposition and characterization of carbon thin films by varying substrate bias and temperature

• Main Author: Chow, Wai Leong.
• Other Authors: Tay Beng Kang
• Format: Final Year Project
• Language: English
• Published: 2010
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
• Online Access: http://hdl.handle.net/10356/40026
• Institution: Nanyang Technological University

The carbon film composition in terms of sp2 or sp3 can differs by varying different deposition techniques and/or parameters. In this project, Filtered Cathodic Vacuum Arc (FCVA) deposition technique is used while in-situ substrate bias and temperature are being varied. For substrate bias, there may...