Deposition and characterisation of carbon thin films via patented Off-Plane Double Bend FCVA deposition system
In this project, carbon thin films that are deposited by Off-Plane Double Bend (OPDB) Filtered Cathodic Vacuum Arc (FCVA) system are characterised. By varying the substrate temperature and voltage bias of the FCVA system, different types of carbon thin film can be obtained. Tetrahedral amorphous car...
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| Format: | Final Year Project |
| Language: | English |
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Nanyang Technological University
2022
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| Online Access: | https://hdl.handle.net/10356/157402 |
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| Institution: | Nanyang Technological University |
| Language: | English |