Deposition and characterization of high-K (Ca,Sr)ZrO3 thin films using sol-gel technique

• Main Author: Yu, Ting
• Other Authors: Zhu, Weiguang
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials; DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: https://hdl.handle.net/10356/3434
• Institution: Nanyang Technological University

There are growing interests in high-k dielectric materials because of their broad future applications for semiconductor industry such as alternative gate oxide, high-density storage capacitors, and high-voltage capacitors.The sol-gel derived CaxSr1-xZrO3 dielectric thin films have been systematicall...