Deposition and characterization of high-K (Ca,Sr)ZrO3 thin films using sol-gel technique

Deposition and characterization of high-K (Ca,Sr)ZrO3 thin films using sol-gel technique

There are growing interests in high-k dielectric materials because of their broad future applications for semiconductor industry such as alternative gate oxide, high-density storage capacitors, and high-voltage capacitors.The sol-gel derived CaxSr1-xZrO3 dielectric thin films have been systematicall...

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書目詳細資料
主要作者:	Yu, Ting
其他作者:	Zhu, Weiguang
格式:	Theses and Dissertations
出版:	2008
主題:	DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
在線閱讀:	https://hdl.handle.net/10356/3434
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!
機構:	Nanyang Technological University

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