Study of leakage current of High-K dielectrics

• Main Author: Yan, Lina
• Other Authors: Wang Junling
• Format: Final Year Project
• Language: English
• Published: 2009
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: http://hdl.handle.net/10356/15235
• Institution: Nanyang Technological University

BST thin film is one of the metal oxides that show high dielectric constant and very good dielectric properties such as long lasting time, low dielectric lose or fast electric response. Another interesting property of this material is that it shows resistive switching behavior with the help of ox...