Deposition and characterization of carbon/carbon composite thin films via FCVA deposition system
The carbon film is first deposited onto a conductive substrate via single-bend filtered cathodic vacuum arc (FCVA) system. By varying the substrate bias and substrate temperature, the microstructure of the amorphous carbon film can change between sp3 rich to sp2 rich. The Nano-Crystalline Graphitic...
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Format: | Final Year Project |
Language: | English |
Published: |
2016
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Online Access: | http://hdl.handle.net/10356/67282 |
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Institution: | Nanyang Technological University |
Language: | English |