Deposition and characterization of carbon/carbon composite thin films via FCVA deposition system

The carbon film is first deposited onto a conductive substrate via single-bend filtered cathodic vacuum arc (FCVA) system. By varying the substrate bias and substrate temperature, the microstructure of the amorphous carbon film can change between sp3 rich to sp2 rich. The Nano-Crystalline Graphitic...

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Bibliographic Details
Main Author: Sun, Jian Xun
Other Authors: Tay Beng Kang
Format: Final Year Project
Language:English
Published: 2016
Subjects:
Online Access:http://hdl.handle.net/10356/67282
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Institution: Nanyang Technological University
Language: English