Characterisation of amorphous carbon films deposited using ECR-CVD

• المؤلف الرئيسي: Wu, Yangsheng.
• مؤلفون آخرون: Yoon, Soon Fatt
• التنسيق: Theses and Dissertations
• اللغة: English
• منشور في: 2008
• الموضوعات: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/13268
• المؤسسة: Nanyang Technological University

Hydrogenated diamond-like carbon (DLC) films have received a considerable amount of interest recently due to their unique characteristics such as chemical stability, mechanical hardness and high optical transparency. Among different deposition methods, the electron cyclotron resonance chemical vapou...