Job scheduling of batch furnace processing in semiconductor wafer fab using simulation approach

Semiconductor wafer fabrication is the most technologically complex and capital intensive phase in semiconductor manufacturing. In semiconductor wafer fab, furnaces are used for diffusion and deposition operations. A furnace is a batch-processing machine, which can simultaneously process a number of...

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Bibliographic Details
Main Author:	Subramanian Harhara Subramanian.
Other Authors:	Sivakumar, Appa Iyer
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Manufacturing::Production management
Online Access:	http://hdl.handle.net/10356/6404
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-6404
record_format	dspace
spelling	sg-ntu-dr.10356-64042023-03-11T17:12:58Z Job scheduling of batch furnace processing in semiconductor wafer fab using simulation approach Subramanian Harhara Subramanian. Sivakumar, Appa Iyer School of Mechanical and Production Engineering DRNTU::Engineering::Manufacturing::Production management Semiconductor wafer fabrication is the most technologically complex and capital intensive phase in semiconductor manufacturing. In semiconductor wafer fab, furnaces are used for diffusion and deposition operations. A furnace is a batch-processing machine, which can simultaneously process a number of lots together as a batch. Master of Science (Computer Integrated Manufacturing) 2008-09-17T11:14:07Z 2008-09-17T11:14:07Z 2003 2003 Thesis http://hdl.handle.net/10356/6404 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Manufacturing::Production management
spellingShingle	DRNTU::Engineering::Manufacturing::Production management Subramanian Harhara Subramanian. Job scheduling of batch furnace processing in semiconductor wafer fab using simulation approach
description	Semiconductor wafer fabrication is the most technologically complex and capital intensive phase in semiconductor manufacturing. In semiconductor wafer fab, furnaces are used for diffusion and deposition operations. A furnace is a batch-processing machine, which can simultaneously process a number of lots together as a batch.
author2	Sivakumar, Appa Iyer
author_facet	Sivakumar, Appa Iyer Subramanian Harhara Subramanian.
format	Theses and Dissertations
author	Subramanian Harhara Subramanian.
author_sort	Subramanian Harhara Subramanian.
title	Job scheduling of batch furnace processing in semiconductor wafer fab using simulation approach
title_short	Job scheduling of batch furnace processing in semiconductor wafer fab using simulation approach
title_full	Job scheduling of batch furnace processing in semiconductor wafer fab using simulation approach
title_fullStr	Job scheduling of batch furnace processing in semiconductor wafer fab using simulation approach
title_full_unstemmed	Job scheduling of batch furnace processing in semiconductor wafer fab using simulation approach
title_sort	job scheduling of batch furnace processing in semiconductor wafer fab using simulation approach
publishDate	2008
url	http://hdl.handle.net/10356/6404
_version_	1761781998591934464

Job scheduling of batch furnace processing in semiconductor wafer fab using simulation approach

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