Job scheduling of batch furnace processing in semiconductor wafer fab using simulation approach
Semiconductor wafer fabrication is the most technologically complex and capital intensive phase in semiconductor manufacturing. In semiconductor wafer fab, furnaces are used for diffusion and deposition operations. A furnace is a batch-processing machine, which can simultaneously process a number of...
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/6404 |
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| Institution: | Nanyang Technological University |