Competitive analysis and conceptual design of semi equipment communication standards and middleware technology

This dissertation focuses on issues concerned with the equipment integration in the semiconductor industry. The objective of this dissertation is to provide a competitive analysis on the available software provided by different vendors and based on the analysis; the dissertation proposes a better so...

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Bibliographic Details
Main Author:	Tin Oo.
Other Authors:	Goh, Kiah Mok
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Systems engineering
Online Access:	http://hdl.handle.net/10356/6545
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-6545
record_format	dspace
spelling	sg-ntu-dr.10356-65452023-03-11T17:22:41Z Competitive analysis and conceptual design of semi equipment communication standards and middleware technology Tin Oo. Goh, Kiah Mok School of Mechanical and Production Engineering DRNTU::Engineering::Systems engineering This dissertation focuses on issues concerned with the equipment integration in the semiconductor industry. The objective of this dissertation is to provide a competitive analysis on the available software provided by different vendors and based on the analysis; the dissertation proposes a better solution to overcome the limitation faced by the existing solution. Master of Science (Computer Integrated Manufacturing) 2008-09-17T11:17:45Z 2008-09-17T11:17:45Z 2003 2003 Thesis http://hdl.handle.net/10356/6545 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Systems engineering
spellingShingle	DRNTU::Engineering::Systems engineering Tin Oo. Competitive analysis and conceptual design of semi equipment communication standards and middleware technology
description	This dissertation focuses on issues concerned with the equipment integration in the semiconductor industry. The objective of this dissertation is to provide a competitive analysis on the available software provided by different vendors and based on the analysis; the dissertation proposes a better solution to overcome the limitation faced by the existing solution.
author2	Goh, Kiah Mok
author_facet	Goh, Kiah Mok Tin Oo.
format	Theses and Dissertations
author	Tin Oo.
author_sort	Tin Oo.
title	Competitive analysis and conceptual design of semi equipment communication standards and middleware technology
title_short	Competitive analysis and conceptual design of semi equipment communication standards and middleware technology
title_full	Competitive analysis and conceptual design of semi equipment communication standards and middleware technology
title_fullStr	Competitive analysis and conceptual design of semi equipment communication standards and middleware technology
title_full_unstemmed	Competitive analysis and conceptual design of semi equipment communication standards and middleware technology
title_sort	competitive analysis and conceptual design of semi equipment communication standards and middleware technology
publishDate	2008
url	http://hdl.handle.net/10356/6545
_version_	1761782041748176896

Competitive analysis and conceptual design of semi equipment communication standards and middleware technology

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