Competitive analysis and conceptual design of semi equipment communication standards and middleware technology

• Main Author: Tin Oo.
• Other Authors: Goh, Kiah Mok
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Systems engineering
• Online Access: http://hdl.handle.net/10356/6545
• Institution: Nanyang Technological University

This dissertation focuses on issues concerned with the equipment integration in the semiconductor industry. The objective of this dissertation is to provide a competitive analysis on the available software provided by different vendors and based on the analysis; the dissertation proposes a better so...