Micro-systems mechanics Vol. IV

• Main Authors: Lin, Rongming, David J. Ewins
• Other Authors: Du, Hejun
• Format: Research Report
• Published: 2008
• Subjects: DRNTU::Engineering::Mechanical engineering::Mechanics and dynamics
• Online Access: http://hdl.handle.net/10356/6846
• Institution: Nanyang Technological University

With the ever-increasing need for larger capacity of hard disk drives (HDDs), conventional servo mechanism - voice coil motor (VCM) - has become a main barrier for higher areal density recording (over 50Gb/in2). In this work, we present a novel micro electrostatic actuator capable of 2-dimensional fine motion. Served as a secondary motion control to both the voice coil motor and air bearing system (ABS), this micro machined electrostatic actuator will be monolithically integrated with the read/write head element. It can regulate the position of read/write head laterally in parallel with the surface of the disk and simultaneously adjust the flying height of the read/write head over the spinning platter. Both static and dynamic analyses of the actuator have been performed by ANSYS. The simulation results show that the magnetic head has a displacement of 0.54 micrometer in the track direction under a driving voltage of 60 volts for horizontal fingers and 11 nanometers of motion in the flying height direction under a driving voltage of 30 volts for vertical fingers, with the corresponding basic resonant frequencies of 71.3K and 35.8K, respectively.