Micro-systems mechanics Vol. IV

• Main Authors: Lin, Rongming, David J. Ewins
• 其他作者: Du, Hejun
• 格式: Research Report
• 出版: 2008
• 主題: DRNTU::Engineering::Mechanical engineering::Mechanics and dynamics
• 在線閱讀: http://hdl.handle.net/10356/6846

With the ever-increasing need for larger capacity of hard disk drives (HDDs), conventional servo mechanism - voice coil motor (VCM) - has become a main barrier for higher areal density recording (over 50Gb/in2). In this work, we present a novel micro electrostatic actuator capable of 2-dimensional f...