Micro-systems mechanics Vol. IV

• المؤلفون الرئيسيون: Lin, Rongming, David J. Ewins
• مؤلفون آخرون: Du, Hejun
• التنسيق: Research Report
• منشور في: 2008
• الموضوعات: DRNTU::Engineering::Mechanical engineering::Mechanics and dynamics
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/6846

With the ever-increasing need for larger capacity of hard disk drives (HDDs), conventional servo mechanism - voice coil motor (VCM) - has become a main barrier for higher areal density recording (over 50Gb/in2). In this work, we present a novel micro electrostatic actuator capable of 2-dimensional f...