Development of a micro-accretion process for three dimensional structures

• 主要作者: Yeo, Swee Hock.
• 其他作者: School of Mechanical and Production Engineering
• 格式: Research Report
• 出版: 2008
• 主題: DRNTU::Engineering::Mechanical engineering::Machine design and construction
• 在線閱讀: http://hdl.handle.net/10356/6916
• 機構: Nanyang Technological University

The development of microsystem technology has initiated various types of microfabrication processes. These processes in turn serve as a platform for the development of new improved processes with increasingly higher fabrication resolution, This work reports on an investigative study on Localized Ele...