Ultra-precision machining and micro fabrication of advanced materials for optical applications
In this project, precisionhltra-precision ductile-mode machining of brittle materials was conducted, and precisionhltra-precision measurement techniques and a method for inspection of semiconductor wafers with micro fabricated devices were developed. By using a simple dressing device developed and a...
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| Format: | Research Report |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/6950 |
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| Institution: | Nanyang Technological University |