Growth of CNTs on graphene for future 3D-IC

• Main Author: Hagi, Theodore
• Other Authors: Tay Beng Kang
• Format: Final Year Project
• Language: English
• Published: 2017
• Subjects: DRNTU::Engineering::Electrical and electronic engineering
• Online Access: http://hdl.handle.net/10356/71827
• Institution: Nanyang Technological University

This project is a part of a research project to realise a combined Graphene and CNTs interconnect to replace copper based interconnect for 3D Integrated Circuit. Graphene and CNTs have shown potential to be a replacement of copper interconnect, which suffer increase of resistivity for dimension belo...