Analysis of semiconductor manufacturing process for performance improvement

Variability is the greatest enemy of a manufacturing system, which causes unstable performances and varies the productivity. This report focuses on reducing the variability and improving the performance of a semiconductor manufacturing process. Other methods to improve the performance of a semicondu...

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書目詳細資料
主要作者: Guo, Xiangyu
其他作者: Lee Yong Tsui
格式: Theses and Dissertations
語言:English
出版: 2017
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在線閱讀:http://hdl.handle.net/10356/72470
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