Analysis of semiconductor manufacturing process for performance improvement

Variability is the greatest enemy of a manufacturing system, which causes unstable performances and varies the productivity. This report focuses on reducing the variability and improving the performance of a semiconductor manufacturing process. Other methods to improve the performance of a semicondu...

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Bibliographic Details
Main Author: Guo, Xiangyu
Other Authors: Lee Yong Tsui
Format: Theses and Dissertations
Language:English
Published: 2017
Subjects:
Online Access:http://hdl.handle.net/10356/72470
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Institution: Nanyang Technological University
Language: English
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