Analysis of semiconductor manufacturing process for performance improvement
Variability is the greatest enemy of a manufacturing system, which causes unstable performances and varies the productivity. This report focuses on reducing the variability and improving the performance of a semiconductor manufacturing process. Other methods to improve the performance of a semicondu...
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Main Author: | Guo, Xiangyu |
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Other Authors: | Lee Yong Tsui |
Format: | Theses and Dissertations |
Language: | English |
Published: |
2017
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Subjects: | |
Online Access: | http://hdl.handle.net/10356/72470 |
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Institution: | Nanyang Technological University |
Language: | English |
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