DATA ANALYTICS FOR QUALITY CONTROL IN SEMICONDUCTOR MANUFACTURING PROCESSES

DATA ANALYTICS FOR QUALITY CONTROL IN SEMICONDUCTOR MANUFACTURING PROCESSES

Ph.D

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Bibliographic Details
Main Author: WANG RUI
Other Authors: INDUSTRIAL SYSTEMS ENGINEERING & MGT
Published: 2019
Subjects:
data mining, statistical process control (SPC), pattern recognition, wafer bin map, semiconductor manufacturing, machine learning
Online Access:https://scholarbank.nus.edu.sg/handle/10635/162834
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Institution: National University of Singapore

Internet

https://scholarbank.nus.edu.sg/handle/10635/162834

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