DATA ANALYTICS FOR QUALITY CONTROL IN SEMICONDUCTOR MANUFACTURING PROCESSES

DATA ANALYTICS FOR QUALITY CONTROL IN SEMICONDUCTOR MANUFACTURING PROCESSES

Ph.D

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Bibliographic Details
Main Author: WANG RUI
Other Authors: INDUSTRIAL SYSTEMS ENGINEERING & MGT
Published: 2019
Subjects:
data mining, statistical process control (SPC), pattern recognition, wafer bin map, semiconductor manufacturing, machine learning
Online Access:https://scholarbank.nus.edu.sg/handle/10635/162834
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Institution: National University of Singapore
id sg-nus-scholar.10635-162834
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spelling sg-nus-scholar.10635-1628342021-11-01T18:00:28Z DATA ANALYTICS FOR QUALITY CONTROL IN SEMICONDUCTOR MANUFACTURING PROCESSES WANG RUI INDUSTRIAL SYSTEMS ENGINEERING & MGT Chen Nan data mining, statistical process control (SPC), pattern recognition, wafer bin map, semiconductor manufacturing, machine learning Ph.D DOCTOR OF PHILOSOPHY (FOE) 2019-12-18T18:00:40Z 2019-12-18T18:00:40Z 2019-08-14 WANG RUI (2019-08-14). DATA ANALYTICS FOR QUALITY CONTROL IN SEMICONDUCTOR MANUFACTURING PROCESSES. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/162834 0000-0001-5958-2234
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic data mining, statistical process control (SPC), pattern recognition, wafer bin map, semiconductor manufacturing, machine learning
spellingShingle data mining, statistical process control (SPC), pattern recognition, wafer bin map, semiconductor manufacturing, machine learning
WANG RUI
DATA ANALYTICS FOR QUALITY CONTROL IN SEMICONDUCTOR MANUFACTURING PROCESSES
description Ph.D
author2 INDUSTRIAL SYSTEMS ENGINEERING & MGT
author_facet INDUSTRIAL SYSTEMS ENGINEERING & MGT
WANG RUI
author WANG RUI
author_sort WANG RUI
title DATA ANALYTICS FOR QUALITY CONTROL IN SEMICONDUCTOR MANUFACTURING PROCESSES
title_short DATA ANALYTICS FOR QUALITY CONTROL IN SEMICONDUCTOR MANUFACTURING PROCESSES
title_full DATA ANALYTICS FOR QUALITY CONTROL IN SEMICONDUCTOR MANUFACTURING PROCESSES
title_fullStr DATA ANALYTICS FOR QUALITY CONTROL IN SEMICONDUCTOR MANUFACTURING PROCESSES
title_full_unstemmed DATA ANALYTICS FOR QUALITY CONTROL IN SEMICONDUCTOR MANUFACTURING PROCESSES
title_sort data analytics for quality control in semiconductor manufacturing processes
publishDate 2019
url https://scholarbank.nus.edu.sg/handle/10635/162834
_version_ 1718367754464002048

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