Multi-zone thermal processing in semiconductor manufacturing: Bias estimation

Multi-zone thermal processing in semiconductor manufacturing: Bias estimation

10.1109/TII.2010.2040285

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Bibliographic Details
Main Authors: Yan, H., Ho, W.K., Ling, K.V., Lim, K.W.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Multi-zone
Robust bias estimator
Semiconductor manufacturing
Sensor bias
Online Access:http://scholarbank.nus.edu.sg/handle/10635/71078
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/71078

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