Multi-zone thermal processing in semiconductor manufacturing: Bias estimation

Multi-zone thermal processing in semiconductor manufacturing: Bias estimation

10.1109/TII.2010.2040285

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Bibliographic Details
Main Authors: Yan, H., Ho, W.K., Ling, K.V., Lim, K.W.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Multi-zone
Robust bias estimator
Semiconductor manufacturing
Sensor bias
Online Access:http://scholarbank.nus.edu.sg/handle/10635/71078
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-710782023-10-29T22:16:28Z Multi-zone thermal processing in semiconductor manufacturing: Bias estimation Yan, H. Ho, W.K. Ling, K.V. Lim, K.W. ELECTRICAL & COMPUTER ENGINEERING Multi-zone Robust bias estimator Semiconductor manufacturing Sensor bias 10.1109/TII.2010.2040285 IEEE Transactions on Industrial Informatics 6 2 216-228 2014-06-19T03:19:35Z 2014-06-19T03:19:35Z 2010-05 Conference Paper Yan, H., Ho, W.K., Ling, K.V., Lim, K.W. (2010-05). Multi-zone thermal processing in semiconductor manufacturing: Bias estimation. IEEE Transactions on Industrial Informatics 6 (2) : 216-228. ScholarBank@NUS Repository. https://doi.org/10.1109/TII.2010.2040285 15513203 http://scholarbank.nus.edu.sg/handle/10635/71078 000277343800010 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Multi-zone
Robust bias estimator
Semiconductor manufacturing
Sensor bias
spellingShingle Multi-zone
Robust bias estimator
Semiconductor manufacturing
Sensor bias
Yan, H.
Ho, W.K.
Ling, K.V.
Lim, K.W.
Multi-zone thermal processing in semiconductor manufacturing: Bias estimation
description 10.1109/TII.2010.2040285
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Yan, H.
Ho, W.K.
Ling, K.V.
Lim, K.W.
format Conference or Workshop Item
author Yan, H.
Ho, W.K.
Ling, K.V.
Lim, K.W.
author_sort Yan, H.
title Multi-zone thermal processing in semiconductor manufacturing: Bias estimation
title_short Multi-zone thermal processing in semiconductor manufacturing: Bias estimation
title_full Multi-zone thermal processing in semiconductor manufacturing: Bias estimation
title_fullStr Multi-zone thermal processing in semiconductor manufacturing: Bias estimation
title_full_unstemmed Multi-zone thermal processing in semiconductor manufacturing: Bias estimation
title_sort multi-zone thermal processing in semiconductor manufacturing: bias estimation
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/71078
_version_ 1781783192149164032

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