Interferential lithography of 1D thin metallic sinusoidal gratings : accurate control of the profile for azimuthal angular dependent plasmonic effects and applications

• Main Authors: Romanato, Filippo, Kang, Husen Kartasasmita, Lee, Kwang Hong, Ruffato, Gianluca, Prasciolu, Mauro, Wong, Chee Cheong
• Other Authors: School of Materials Science & Engineering
• Format: Article
• Language: English
• Published: 2010
• Subjects: DRNTU::Engineering::Materials::Plasma treatment
• Online Access: https://hdl.handle.net/10356/79924; http://hdl.handle.net/10220/6205
• Institution: Nanyang Technological University

Nonlinear processes involved in the manufacture of nominally sinusoidal surface relief diffraction gratings generated by interference lithography can introduce distortions into the profile of these surfaces. Such distortions may dramatically affect both the specular reflectivity and diffracted effic...